These filters are designed to help enhance flow characteristics, including low-pressure drop, to minimize shearing of the slurry, while providing an excellent service life. The objective of a slurry filter is to allow most particles to pass through unchanged, while only removing the undesired or “oversized” particles, commonly referred to as large particle counts (LPCs). LPCs typically form over time when the suspended particles in the slurry settle to dry, forming aggregates, agglomerates and gels. Adverse shipping conditions, shearing, slurry drying and interaction with other distribution loop components such as fittings, tanks, piping, valves and pumps can also result in LPCs, which can scratch metal and inter-level dielectric layers, potentially causing wafer defects. As a dependable solution to reduce LPCs that could decrease yields, 3M Betapure PPK series filters help maintain the polishing characteristics of your slurry while reducing potential production pitfalls, bringing you a high standard in effective and efficient filtration.

Variations in your slurry’s particle size distribution can compromise the repeatability of the planarization process. Our filters are here to help by maintaining your slurry’s polishing characteristics while maximizing the contaminant holding capacity and extending filter lifetimes. Ensuring proper filtration drastically reduces the potential for defectivity and increases the repeatability of the planarization process. Designed with precision, our 3M Betapure PPK series filter has a retention curve that closely aligns with the particle size distribution (PSD) of undesired particles that need to be removed, ensuring high retention and low-pressure drop without altering the percentage of solids or desired target size particles, resulting in undisturbed polishing characteristics. The capsules are manufactured using the most advanced thermoplastic welding techniques — no adhesives, binders or surfactants are used in the process. Delivering optimal performance with an emphasis on durability, our filters ensure consistency and reliable results, essential for any successful planarization process.